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An FEM-based 3-dimensional
piezoresistive effect ( PRE ) analysis program system,
PREAPS, has been developed. The PREAPS consists
of three parts; a stress analyzer using crystal
compliance anisotropy, a PRE converter which converts
stress to conductivity with PRE coefficients, and
an electrical analyzer using 3-dimensional anisotropic
conductivity. This system enables us to consider
the effect of the stress distribution in the device
and to analyze the related 3-dimensional PRE. The
PREAPS is an analytical tool for PRE devices which
have arbitrary structures, electrode patterns, and
crystal orientations. Also, it is applicable to
other devices, such as pressure sensors with a diaphragm,
acceleration sensors, and thin film devices.
The PREAPS is used
for the analysis and design of a force detecting
element of an advanced combustion pressure sensor
(CPS). The PREAPS has made it possible to achieve
the high productivity of the CPS and to design an
electrode pattern with the highest efficiency.
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