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Vol.32 No.1(1997.3)
Research Report
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Thin Film Magnetic
Element Utilizing Magneto-Impedance Effect
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Yuji Nishibe, Takeshi Morikawa,
Hideya Yamadera, Jiro Sakata,
Yutaka Nonomura, Masaharu Takeuchi,
Yasunori Taga
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A Magneto-Impedance ( MI ) effect which exhibited
the strong dependence of impedance on external
magnetic field was found in amorphous wire by
Mohri etc. four years ago. It is well known that
the Magneto-Impedance ( MI ) effect is a new magnetic
field detection principle and presents a possibility
of achieving magnetic sensors with high performance.
Therefore, our research interest has focused on
MI phenomenon in thin film element, taking account
of compatibility with circuit and easiness of
installation. We have proposed a multi-layered
thin film element with the MI effect, which consists
of the Cu layer covered with amorphous magnetic
layers and the magnetic layers with magnetic anisotropy
added in the transverse direction of the element.
The MI effect in this multi-layered thin film
element is much superior to that in conventional
wire element. As a result, when an external magnetic
field was applied, a high impedance change ratio
was achieved, such as 100% / 10 Oe, and is much
higher than that of any other element having MI
effect. This thin film element utilizing MI effect
has the advantages of small size, light weight,
high resolution, and quick response. Therefore,
this thin film element is useful not only for
application of rotary encoder, but also for sensing
purposes of ( various physical quantities such
as ) displacement, current and direction.
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