SrTiO3 (STO) films have been studied
in view of application to the reduction of the
influence of electro-magnetic noise on automobile
ICs. STO films were prepared by the RF magnetron
sputtering method under the conditions of Ti-rich
composition (Ti/Sr = 1.2) and high substrate temperature
(Ts = 560°C). Electrical properties such
as the breakdown voltage and dielectric constant
of STO films were evaluated by conventional I-V
measurements using a metal-insulator-metal capacitor
structure. It was found that STO films provide
excellent insulation of Ebd = 2MV/cm and have
a high dielectric constant of e
r = 140 up to a high frequency of 2GHz. In addition,
TEM observation of the STO films thus formed revealed
that the films have a complex columnar structures,
which include crystal grains and amorphous layers.
Electrical properties of the STO films obtained
in this study can be explained in terms of the
coexistence of crystal grains with amorphous layers.
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