A 16 × 16 monolithic pyroelectric infrared image sensor has been developed. This image sensor utilizes an electro-spray (ESP) deposited polyvinylidene fluoride (PVDF) thin film as a pyroelectric material, a buried channel MOSFET as a low noise detection device, and a micromachined four-beam-supported membrane as a thermal isolation structure. A voltage sensitivity of 6600 V/W and a detectivity of 1.6 × 10⁷ cmHz^1/2W^-1 have been realized with a sensing area of 75mm × 75mm at a chopping frequency of 55 Hz. A thermal image of the circular window of a black body furnace has been successfully obtained. These results offer the promising prospect of a monolithic pyroelectric IR image sensor, although the uniformity in voltage sensitivity, noise and offset voltage still remain to be improved.