Recently, a magneto impedance effect found in
amorphous wires with soft magnetic properties
has been noted as a new principle in the sensing
magnetic field. According to this effect, the
impedance of the wire in the range of high frequencies
over 10 MHz changes remarkably with an external
magnetic field. This effect is expected to be
promising for magnetic field sensors with high
sensitivity. Therefore, we have attempted to introduce
this effect into amorphous thin films to extend
the application fields, and a novel thin film
sensor sensitive to a small magnetic field based
on the magneto impedance effect has been proposed.
The sensor consists of two individual detecting
elements with FeCoSiB/Cu/FeCoSiB multi-layers
which forms a half bridge. The detecting element
exhibits a large impedance change ratio of more
than 100% when an external magnetic field is applied.
By optimizing of the operating point via a bias
field and processing the signal with a synchronous
rectifier circuit, no hysteresis, good linearity
and good stability even with temperature variation
as well as high sensitivity in the sensor characteristics
have been achieved. The variation in the sensor
output with the temperature is largely reduced
to one-third, compared to the conventional thin
film sensor we developed previously. A detection
resolution of 10-3 Oe order higher
than those of any other conventional thin film
sensors is obtained.
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