A vibrating gyroscope consisting of three layers
of polysilicon thin films has been developed.
It has an upper electrode over a resonating mass
for detecting the sensing vibration oscillated
by the Coriolis force accurately. The resonant
frequency of both driving and sensing vibration
is successfully controlled by the DC bias to comb
electrodes that are used for detecting the driving
vibration. The offset on the angular rate output
due to the mechanical and electromechanical couplings
is decreased by an unbalanced differential oscillation.
With this tuning method and the offset reduction,
the angular rate was detected. The resolution
of 1 deg/sec is achieved.